Magnetron sputtering
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AlN, AlScN family
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Au, Pt
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Al, Pt, Mo, Ti, Ta, Cr,…
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SiO2, SiN, Al2O3, TiO2,…
Pulsed Laser Desposition (PLD)
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PBZT (Barium doped PZT)
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LaNiO3
Plasma enhanced CVD
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SiO2, SiN, a-Si
Evaporation
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Au, Ag, Pt
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Al, Pt, Mo, Ti, Ta, Cr,…
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SiO2, ZrO, MgO, …