Piezoelectric thin film analysis

  • 4 point bending technique

    Full test structure fabrication

    Mapping over the wafer

  • Large and small signal

    Full test structure fabrication

    Mapping over the wafer

  • From mHz to GHz

    Full test structure fabrication if needed

    C-V and P-V loops

    Large and small signal measurement

Microstructural thin film analysis

  • EDAX

  • XRD

    SEM

    TEM

    FIB

Ceramic pallet analysis