The standard actuator element in piezo-MEMS devices is a piezoelectric laminated flexural structure that works on the basis of the transverse piezoelectric effect. Such actuators are optimal when a large displacement is required, as the deflection amplitude is indeed amplified by the length of the structure. In the world of bulk or thick film materials, the longitudinal effect is greatly exploited, for instance as multilayers (ML) in actuators for injection valves. MLs allow driving voltages to be decreased. In the MEMS world, there are applications permitting only very small driving voltages, for instance for implants, for which ML bending structures would be needed.
Multi layered Piezoelectric thin film
Thanks to our proprietary knowledge, Piemacs is the first company in the world who has integrated piezoelectric thin film multi-layers into MEMS.
Due to the good integration into existing processing technologies, platinized silicon wafers are commonly used as substrates. However, many applications are showing the need to utilize substrates other than silicon wafers. Metallic foils offer several advantages like higher toughness, more adapted thermal expansion, and eventually better chemical compatibility, as compared to silicon-based materials such as crystalline silicon, nitride membranes, etc. At PIEMACS our capabilities extend to the deposition of piezoelectric thin films not only on metalized Si substrate but also on metallic substrate.
Piezoelectric thin film on metal
No one in the world offers Piezo on metal!