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High quality Sol-Gel PZT thin film deposition on different substrates from chips to 150 mm wafers. |
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High quality sputtered PZT thin films on 150 mm wafers. Special holders for metallic foils are available. Holders specific to your samples can be fabricated. |
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High quality sputtered AlN and AlScN thin film deposition on 100 mm wafers. Holders specific to your samples can be fabricated. |
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